Applied Materials and Surface Science Laboratory
Berkeley Composites Laboratory
Berkeley Computer Aided Manufacturing
Berkeley Electrochemical Research Council
Berkeley Manufacturing Institute
Berkeley Microfabrication Laboratory
Berkeley Sensor and Actuator Center (BSAC)
Center for Information Technology Research in the Interest of Society
Center for X-Ray Optics
Competitive Semiconductor Manufacturing Program
Consortium on Green Design and Manufacturing
Device Group
Heterogeneous Materials Integration Research Group
Integrated Materials Laboratory
Laboratory for Manufacturing Automation
Mechanical Systems Control Laboratory
Plasma Theory and Simulation Group
Silicon Wafer Engineering and Defect Science Center
Small Feature Reproducibility (SFR)
Applied
Materials and Surface Science Laboratory 